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Canon Launches Sales Of New FPA-3030EX6 KrF Excimer Laser Stepper In Preparation For Expanding IoT MarketMELVILLE, N.Y., July 14, 2016 /PRNewswire/ -- Canon U.S.A., Inc., a leader in digital imaging solutions, has announced that its parent company, Canon Inc., has launched sales of the new FPA-3030EX6 KrF excimer laser stepper1 designed to enable analog chips, sensors and communication devices to harness the power of the Internet of Things (IoT). With the dawn of the IoT, in addition to PCs and smartphones, cars, appliances, industrial equipment, all manner of "things" will be equipped with sensors and communication devices that allow them to connect to the internet to send and receive data. Canon, anticipating the expansion of the market for such devices, has begun sales of the FPA-3030EX6 for the production of analog semiconductors, sensors and communication devices. The KrF excimer laser stepper, which accommodates small-sized substrates with diameters of 200mm or less, inherits the functionality of its predecessor, the FPA-3000EX6, while also offering compatibility with special substrates used in the fabrication of a multitude of devices to meet the diverse needs of semiconductor manufacturers. The fabrication of IoT-related devices and power devices involves a variety of substrate materials including silicon, sapphire, silicon carbide and glass, as well as varying wafer diameters and thicknesses. Sharing the same wafer feeding system as the FPA-3030i5+ i-line stepper2 (released in June 2012), with a proven track record handling special and small-sized substrates, the FPA-3030EX6 is capable of handling a variety of substrate types The new stepper delivers one of the highest levels3 of resolution, overlay accuracy and productivity (throughput) among KrF excimer laser steppers in the same class. The FPA-3030EX6 platform uses the same reticle and recipe as the FPA-3000EX6, making possible the effective utilization of existing equipment and assets. About Canon U.S.A., Inc. † Based on weekly patent counts issued by United States Patent and Trademark Office. 1 A semiconductor lithography system that utilizes a 248 nm exposure wavelength laser generated by combining the noble gas krypton (Kr) and the halogen gas fluoride (F). 2 A semiconductor lithography system that utilizes a 365 nm wavelength mercury lamp as the light source. 3 As of July 4, 2016, based on a Canon survey. All referenced product names, and other marks, are trademarks of their respective owners. Actual prices set by dealers, and may vary. Availability dates are subject to change without notice. Canon U.S.A. website: For sales information/customer support: Photo - http://photos.prnewswire.com/prnh/20160714/389717 To view the original version on PR Newswire, visit:http://www.prnewswire.com/news-releases/canon-launches-sales-of-new-fpa-3030ex6-krf-excimer-laser-stepper-in-preparation-for-expanding-iot-market-300298965.html SOURCE Canon U.S.A., Inc. |