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Axcelis Announces Launch of Optima HD Ion Implanter; Newest Tool in Optima Family Sets Standard for High Dose Applications Coverage and Implant Precision
BEVERLY, Mass. --(Business Wire)-- Jan. 19, 2006 -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced the introduction of the Optima HD, the industry's only ion implanter designed to address traditional high dose implants as well as the expanding range of applications in sub-65nm generation device manufacturing. The system is the latest tool in Axcelis' versatile Optima implant family. Axcelis will unveil the Optima HD during a live Webcast at 10:00 a.m. ET on Tuesday, January 24, 2006.
The low energy, high dose system offers the market's widest energy range, from 200eV to 80KeV, enabling customers to cover all traditional high dose implants while providing significant mid-dose applications overlap for maximum versatility and capital efficiency. The Optima HD also supports molecular and hydrogen implants for emerging dual poly gate and silicon-on-insulator applications to improve device speed and performance. Axcelis expects to ship the first systems during the second quarter of 2006.
"We believe the Optima HD is the most precise, versatile and productive high dose implanter on the market today," said Mary Puma, chairman and CEO of Axcelis. "As with the entire Optima platform, we designed the Optima HD to support the fundamental changes happening in transistor formation as we move into sub-65nm technology nodes. Specifically, the Optima HD was born out of Axcelis' strategy to develop extendible implant technologies that give customers the most flexibility to address current requirements while meeting the challenges emerging from new generations of transistor designs and device structures."
Axcelis' Optima HD delivers precise implants using advanced spot beam technology, which ensures all points across the wafer see the same beam at the same angle, resulting in exceptional implant repeatability. In addition, the system uses Axcelis' proprietary RadiusScan(TM) technology, a hardware feature that enhances productivity and allows the system to cover a broad dose range, enabling customers to address both traditional and emerging high dose implant needs.
Webcast Details
Axcelis will host a Webcast on January 24, 2006 at 10:00 a.m. ET to discuss the Optima HD introduction. The live presentation will be accessible through Axcelis' home page at www.axcelis.com. Prior to the start of the Webcast, please access the presentation feed by clicking on "Investors" and "Events" and click on the appropriate icon.
For audio only and to participate in the Q&A, dial 1-888-569-5033 (1-719-457-2653 outside North America). Participants calling into the conference call will be requested to provide the company name: Axcelis Technologies and the conference leader: James Kawski. A telephone replay will be available from 8:00 p.m. ET on January 24, 2006 until 11:59 p.m. ET on January 31, 2006. Dial 1-888-203-1112 (1-719-457-0820 outside North America) and enter conference ID code #7335204. A Webcast replay will be available from 8:00 p.m. ET on January 24, 2006 until 5:00 p.m. ET on February 24, 2006.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.
Forward-Looking Statements
This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.
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