Tegal Corporation Chairman Brad Mattson to Participate in Fourth Quarter and Fiscal Year 2005 Financial Conference Call
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[May 18, 2005]

Tegal Corporation Chairman Brad Mattson to Participate in Fourth Quarter and Fiscal Year 2005 Financial Conference Call

PETALUMA, Calif. --(Business Wire)-- May 18, 2005 -- Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, announced today that its recently named Chairman of the Board, Brad Mattson, will participate in the Company's fourth quarter and fiscal year 2005 earnings conference call tomorrow, May 19, at 2:00 p.m. (PDT), following the scheduled issuance of its earnings news release.



Mr. Mattson is a highly regarded executive and entrepreneur in the semiconductor equipment industry. He founded and served as CEO and Chairman of Mattson Technology, where he developed the Aspen platform and Strip system, retiring in 2001. Previously, he founded Novellus Systems, where he served as CEO and Chairman. At Novellus, he developed and introduced the Concept One system, which launched the Company. Prior to that, Mr. Mattson held various management, marketing and technical positions at Applied Materials and LFE Corporation.

Mr. Mattson has degrees from Santa Clara University and San Jose State University. He is a member of the Board of Regents of Santa Clara University and of the Board of Directors of SEMI, the leading Semiconductor Equipment Industry Association. Mr. Mattson has been honored with the Entrepreneur of the Year Award in 1988 and the Distinguished Alumni Award from San Jose State University. He also holds 12 patents in various semiconductor equipment and process related areas.



Pertinent Tegal investor conference call information is as follows: -0- *T Date: Thursday, May 19 Time: 5:00 p.m. EDT / 2:00 p.m. PDT Call-in #: 800-299-7089 or 617-801-9714 (for international callers) *T

Investors should reference pass code: 68300902. A digital recording will be made available one hour after the completion of the conference call, and it will be accessible through midnight on Thursday, May 26, 2005. To access, investors should dial 888-286-8010 or 617-801-6888 (for international callers) and enter pass code: 49394839. The conference call also will be available live via the Investor Section of the Company's website at www.tegal.com. A replay of the teleconference, along with a copy of the Company's earnings release, will be available on the Company's website, as well.

About Tegal

Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

More information is available on the Internet at www.tegal.com.

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