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e-Shuttle to Feature Electron-Beam Direct Write (EBDW) Technology at GSA Suppliers Expo(Wireless News Via Acquire Media NewsEdge) e-Shuttle, a company established by Fujitsu Microelectronics and Advantest Corp. to provide prototyping services for large-scale ICs, announced it will feature its Electron-Beam Direct Write (EBDW) technology at the GSA Suppliers Expo & Conference in the Santa Clara Convention Center, October 2. At the event, e-Shuttle noted, it will show a 300mm wafer developed using its 65nm technology, along with a roadmap highlighting features and developments. e-Shuttle said it is offering the EBDW technology for manufacturing 65nm CMOS logic ICs, which represents the first full-scale application of EBDW techniques for complex devices. The company is also applying EBDW technology for devices using 90nm process technology, manufacturing structured ASICs for fabless semiconductor companies. Producing single-layer via interconnect patterns using EBDW provides a short delivery cycle with mask-less production, with yields comparable to optical lithography. The 300mm wafer shuttle service -- in which wafer delivery combines the orders of multiple customers -- reduces costs. Via layers are formed using EBDW, reducing the significant costs involved in forming via layers for ultra-fine interconnects using masks. The EBDW technology has achieved excellent results without compromising yield, demonstrating that EB lithography and ArF lithography can coexist in the fabrication process. The e-Shuttle F3000 system features a short focal length lens that reduces coulomb interaction when beam current density is high. The F3000 also can project as many as 100 different patterns in a single block area, with a total of 12 blocks available for the user. In addition, in-situ cleaning eliminates the risk of contamination and assures high up-time operation. ((Comments on this story may be sent to [email protected])) ((Distributed on behalf of 10Meters via M2 Communications Ltd - http://www.m2.com)) ((10Meters - http://www.10meters.com)) Copyright ? 2008 Wireless News |