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Gigaphoton Develops Spectral Width Control Technology "hMPL"Gigaphoton Inc. (Head Office: Oyama, Tochigi; President & CEO: Katsumi Uranaka), a leading manufacturer of light sources used in semiconductor lithography, introduced their latest optical design and manufacturing technology (= Cutting Edge Solution), and announced the development of Spectral Width Control Technology, "hMPL". hMPL has already received highly favorable evaluations from chip manufacturers in pilot experiments, and will go on to respond to future advanced semiconductor manufacturing applications.
Spectral width is one of the most important parameters in the
semiconductor lithography process. Gigaphoton's hMPL decreased the
optical thermal load for the LNM (Line-Narrowing Module) and reduced the
spectral width target value from the existing 300 fm (femtometers) to
200 fm. In addition, by introducing a new control algorithm, widening to
an upper limit of up to 450 fm became possible. Katsumi Uranaka, President & CEO of Gigaphoton commented, "Spectral Width Control Technology, (hMPL) was developed to meet the demand for semiconductors, which is expected to increase still further with the growth of an IoT-based society. We will continue to contribute to the semiconductor industry, supporting our customers with state-of-the-art technology. " *A news release concerning the GT65A is available at http://www.gigaphoton.com/en/news/4938
About Gigaphoton
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