|[February 05, 2013]
Mitsubishi Electric Develops Multi-wire Electrical Discharge Slicing Technology for Silicon Carbide (SiC) Ingot Processing
TOKYO --(Business Wire)--
Electric Corporation (TOKYO:6503) announced today it has developed a
prototype multi-wire electrical discharge processing technology to cut
very hard 4 inch square polycrystalline silicon carbide (SiC) ingots
into 40 pieces at once. The technology is expected to improve both the
productivity of SiC slicing and the effective use of SiC material.
Mitsubishi Electric (News - Alert) aims to market its multi-wire electrical discharge
slicer by fiscal 2015.
SiC is expected to be used increasingly in power semiconductors due to
its superior energy-saving and CO2 emissions-reduction properties
compared to silicon. Until now, sliced wafers have been produced through
multi-wire saw with diamond particles because SiC is the third hardest
compound on earth, but this method requires lengthy machining time and
large kerf widths. The new parallel multi-wire electrical discharge
machining method utilizes Mitsubishi Electric's proven electrical
discharge technology for difficult-to-cut material, and employs a
dedicated power supply specially developed for SiC.
Simultaneous cutting of SiC ingots into 40
Forty wire electrodes with a diameter of 0.1 mm aligned at 0.6mm
intervals are rotated to cut 40 slices at once, improving productivity.
The non-contact, thermal process-wire electrical discharge method
slices faster and at closer intervals compared to contact cutting (220
micro meters or less cut at a speed of 80 micro meters per minute)
More wafer slices extracted per SiC ingot for improved efficiency.
Power supply dedicated to SiC slice processing
Simultaneous wire cuts with even energy enabled by 40 electrically
independent power feed contacts to wire electrodes.
Uninterrupted processing with even very thin (0.1mm) wire electrodes
thanks to a newly developed high-frequency power supply tailored to
the characteristics of SiC material.
Pending patents for the technology number 22 in Japan and 10 overseas.
About Mitsubishi Electric
With over 90 years of experience in providing reliable, high-quality
products, Mitsubishi Electric Corporation (TOKYO:6503) is a recognized
world leader in the manufacture, marketing and sales of electrical and
electronic equipment used in information processing and communications,
space development and satellite communications, consumer electronics,
industrial technology, energy, transportation and building equipment.
Embracing the spirit of its corporate statement, Changes for the Better,
and its environmental statement, Eco Changes, Mitsubishi Electric
endeavors to be a global, leading green company, enriching society with
technology. The company recorded consolidated group sales of 3,639.4
billion yen (US$ 44.4 billion*) in the fiscal year ended March 31, 2012.
For more information visit http://www.MitsubishiElectric.com
an exchange rate of 82 yen to the US dollar, the rate given by the Tokyo
Foreign Exchange Market on March 31, 2012
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