[April 13, 2012]

Update: Rudolph Technologies Schedules 2012 First Quarter Earnings Conference Call and Webcast

Rudolph Technologies, Inc. (Nasdaq: RTEC), a leading provider of process characterization equipment and software for wafer fabs and advanced packaging facilities, will release results for the 2012 first quarter at 4:30pm EDT, Monday, April 30, 2012. In conjunction with this release, Rudolph will host a conference call, which will be broadcast live over the Internet. Paul F. McLaughlin, Chairman and Chief Executive Officer, and Steven Roth, Chief Financial Officer will host the call.

To access the live conference call, please dial (888) 603-6873 and reference Conference ID # 71094029. A live webcast will also be available on the Company's website at www.rudolphtech.com.

There will be a replay of the conference call available for one week following the live broadcast. To access the replay, please dial 855-859-2056 and reference Conference ID # 71094029.

Thank you for your interest in Rudolph Technologies, Inc.

Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The company's yield management solutions are used in both the wafer processing and final manufacturing of ICs, as well as in emerging markets such as LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

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